| Diameter: | 10.60" |  |
| Length: | 11.20" | |
| Substrate Opening: | ||
| Target Dimensions: | ||
| Length: | 8.0" | |
| Diameter: | 6.0" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |
When the surface really matters
| Diameter: | 10.60" | |
| Length: | 11.20" | |
| Substrate Opening: | ||
| Target Dimensions: | ||
| Length: | 8.0" | |
| Diameter: | 6.0" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |