| Diameter: | 12.8" |  |
| Length: | 8.8" | |
| Substrate Opening: | 5.75" | |
| Target Dimensions: | ||
| Length: | 8.125" | |
| Diameter: | 7.5" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |
When the surface really matters
| Diameter: | 12.8" | |
| Length: | 8.8" | |
| Substrate Opening: | 5.75" | |
| Target Dimensions: | ||
| Length: | 8.125" | |
| Diameter: | 7.5" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |