| Diameter: | 14.90" |  |
| Length: | 16.20" | |
| Substrate Opening: | 7.0" | |
| Target Dimensions: | ||
| Length: | 8.125" | |
| Diameter: | 13.50" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |
When the surface really matters
| Diameter: | 14.90" | |
| Length: | 16.20" | |
| Substrate Opening: | 7.0" | |
| Target Dimensions: | ||
| Length: | 8.125" | |
| Diameter: | 13.50" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |