| Diameter: | 5.50" |  |
| Length: | 7.80" | |
| Substrate Opening: | .75" | |
| Target Dimensions: | ||
| Length: | 6.5" | |
| Diameter: | 2.0" | |
| Cooling H2O: | 1 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 2kW DC |
When the surface really matters
| Diameter: | 5.50" | |
| Length: | 7.80" | |
| Substrate Opening: | .75" | |
| Target Dimensions: | ||
| Length: | 6.5" | |
| Diameter: | 2.0" | |
| Cooling H2O: | 1 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 2kW DC |