| Diameter: | 6.5" |  |
| Length: | 18.4" | |
| Substrate Opening: | .75" | |
| Target Dimensions: | ||
| Length: | 8.5" | |
| Diameter: | 2.0" | |
| Cooling H2O: | 2 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 5kW DC |
* Model 522 UHV is designed to be integrated into the vacuum system in an in-line fashion. Both ends of the cathode connect to other system components with 4 1/2" metal seal flanges. The materials in th Model 522 UHV are ultra-high vacuum compatible and bakable to 400 c.
