| Diameter: | 30.0" | |
| Length: | 7.8" | |
| Substrate Opening: | 0" | |
| Target Dimensions: | ||
| Length: | 24.25" | |
| Diameter: | 7.0" | |
| Cooling H2O: | 5 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 6kW DC |
When the surface really matters
| Diameter: | 30.0" | |
| Length: | 7.8" | |
| Substrate Opening: | 0" | |
| Target Dimensions: | ||
| Length: | 24.25" | |
| Diameter: | 7.0" | |
| Cooling H2O: | 5 GPM | |
| Operating Pressure: | .5mTorr to 20mTorr | |
| Max Continuous Power: | 6kW DC |